Scanning-type probe microscope
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United States of America Patent
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N/A
Issued Date -
Jan 18, 2007
app pub date -
Jul 26, 2004
filing date -
Jul 29, 2003
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention provides a scanning probe microscope that is straightforward to use under sever environments. Optical fiber irradiates light from a laser diode towards the surface of a cantilever. The irradiated light is converged by a lens so as to irradiate the surface of the cantilever. Light reflected from the surface of the cantilever is focused by the lenses and inputted to optical fibers. Light passing through the optical fibers is then received by the photodiodes. Inclination of the cantilever is then detected based on changes in the amount of light received.
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