Measuring apparatus
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United States of America Patent
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Issued Date -
Jan 18, 2007
app pub date -
Jul 13, 2006
filing date -
Jul 15, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus for determining the topography, shape, or form of (machined) objects is disclosed. The apparatus operative to perform consecutive measurements of the optical path difference (OPD) between a reference surface on one hand and a series of laterally displaced points on one or more partially reflecting surfaces of an object on the other hand. The inventive apparatus comprises light source means for emitting light that is swept in optical frequency; means for exposing said surfaces to light from said light source means; means for combining and detecting the light reflected back by said surfaces; means for performing a frequency analysis of the detected signal; and means for calculating OPD from the obtained frequencies. The speed of the frequency sweep is preferably above 50 GHz/.mu.s.
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