Systems and methods for achieving a required spot says for nanoscale surface analysis using soft x-rays
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United States of America Patent
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app pub date -
Jun 12, 2006
filing date -
Mar 29, 2004
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Abandoned
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Abstract
A nano-scale surface analysis system is configured to reduce a laser-produced plasma spot size, while maintaining flux levels at target. The system comprises a condenser zone plate operable to receive short wavelength radiation and focus the short wavelength radiation into a spot on the target. The target is positioned such it is located at an order of diffraction of the condenser zone plate that is greater than the first diffractive order of the condenser zone plate and sufficient to demagnify the spot to a diameter less than one micron. In addition, the target is still positioned such that a flux created at the target by the spot is sufficient to produce a nanoplasma.
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