Method of wet coating for applying anti-reflective film to substrate
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United States of America Patent
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Mar 24, 2009
Grant Date -
Jan 25, 2007
app pub date -
Aug 5, 2005
filing date -
Sep 2, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of wet coating for applying an anti-reflective film to a substrate comprises the following steps: (1) providing and cleaning a substrate; (2) preparing a coating solution comprised of a highly volatile solvent and a film-forming compound dissolved in the highly volatile solvent; (3) coating the substrate homogeneously with the above coating solution at normal temperature and confirming complete evaporation of the liquid on the substrate at normal temperature to finish a single layer coating without thermal treatment; and (4) repeating the above coating step as required to obtain a desired number of layers.
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