Method of making non-volatile field effect devices and arrays of same
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United States of America Patent
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Issued Date -
Jan 25, 2007
app pub date -
Sep 26, 2006
filing date -
Jun 9, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods of making non-volatile field effect devices and arrays of same. Under one embodiment, a method of making a non-volatile field effect device includes providing a substrate with a field effect device formed therein. The field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. An electromechanically-deflectable, nanotube switching element is formed over the field effect device. Terminals and corresponding interconnect are provided to correspond to each of the source, drain and gate such that the nanotube switching element is electrically positioned between one of the source, drain and gate and its corresponding terminal, and such that the others of said source, drain and gate are directly connected to their corresponding terminals.
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