Method of patterning ultra-small structures
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United States of America Patent
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Issued Date -
Feb 15, 2007
app pub date -
Aug 15, 2005
filing date -
Aug 15, 2005
priority date (Note) -
Abandoned
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Abstract
We describe a process to produce ultra-small structures of between ones of nanometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished with pulsed electroplating techniques using ultra-short pulses in a controlled and predictable manner.
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