Multilayer getter structures and methods for making same

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United States of America Patent

SERIAL NO

11497802

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Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conte, Andrea Milan, IT 40 219
Moraja, Marco Milan, IT 12 54

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