Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals
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United States of America Patent
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Issued Date -
Feb 22, 2007
app pub date -
Aug 19, 2005
filing date -
Aug 19, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate. In addition or alternatively, one of the arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.
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