Importance

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Abstract

A single-piece backing plate for a sputtering target is disclosed where cooling passages are formed internal to the backing plate. In some embodiments, cooling passages can be formed through the edges of a single plate of material by gun drilling. These passages can then be sealed at the edge so as to form cooling passages within the plate. A sputtering target can then be bonded to one side of the plate to form a target assembly. In some embodiments, an insulating plate can be permanently bonded a side of the backing plate. Some embodiments of the target plate according to the present invention remove the need for multiple internal sealing surfaces, multiple attachment devices, and external back-side plasma suppression plates that are often utilized in conventional backing plate assemblies.

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First Claim