Plasma excitation system
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United States of America Patent
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N/A
Issued Date -
Mar 1, 2007
app pub date -
Dec 23, 2005
filing date -
Dec 24, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A plasma excitation system includes at least one DC current supply connected to a mains supply, at least one medium frequency (MF) unit connected to the at least one DC current supply for generating an AC voltage at its output, and a controller. The output of the MF unit is connected to electrodes of a coating chamber. The controller is connected to the at least one DC current supply for regulating and/or controlling an output value of the DC current supply, and is also connected to the at least one MF unit for regulating and/or controlling an output value of the MF unit. The controller includes at least one input interface for supplying a value describing an output value of the at least one MF unit, and at least one control output interface for connecting a control input of the at least one MF unit.
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