Laser induced plasma machining with a process gas
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United States of America Patent
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Issued Date -
Mar 1, 2007
app pub date -
Aug 23, 2005
filing date -
Aug 23, 2005
priority date (Note) -
Abandoned
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Abstract
Embodiments of methods of laser machining that include inducing formation of a plasma plume from a process gas through interaction of the gas with a laser beam are disclosed. The methods may include removing material from the substrate by interaction of the induced plasma plume with the substrate.
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