METHOD FOR CONTINUOUSLY BLENDING CHEMICAL SOLUTIONS
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United States of America Patent
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Issued Date -
Mar 1, 2007
app pub date -
Oct 23, 2006
filing date -
Dec 20, 1999
priority date (Note) -
Abandoned
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Abstract
Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of mixing a first chemical stream with a second chemical stream in a controlled manner to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.
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