Polishing method, polishing composition and polishing composition kit
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United States of America Patent
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Issued Date -
Apr 5, 2007
app pub date -
Sep 29, 2006
filing date -
Sep 30, 2005
priority date (Note) -
Abandoned
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Abstract
A polishing method for polishing a polysilicon film provided on a silicon substrate having an isolation region is provided. The method includes preliminarily polishing the polysilicon film using a preliminary polishing composition containing abrasive grains, an alkali, a water-soluble polymer, and water till a part of the top surface of the isolation region is exposed; and finally polishing the preliminarily polished polysilicon film using a final polishing composition containing abrasive grains, an alkali, a water-soluble polymer, and water till the whole top surface of the isolation region is exposed. The content of the water-soluble polymer in the preliminary polishing composition is 0.0075-0.05% by mass, and the content of the water-soluble polymer in the final polishing composition is 0.002-0.01% by mass.
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