Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
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United States of America Patent
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Jul 20, 2010
Grant Date -
May 3, 2007
app pub date -
Oct 31, 2005
filing date -
Oct 31, 2005
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Abstract
Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.
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