Process kit and target for substrate processing chamber

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9127362
APP PUB NO 20070102286A1
SERIAL NO

11553982

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Importance

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Abstract

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A process kit comprises a ring assembly that is placed about a substrate support in a substrate processing chamber to reduce deposition of process deposits on the chamber components and on an overhang edge of the substrate. The process kit includes a deposition ring, cover ring, and anti-lift bracket, and can also include a unitary shield. A target is also described.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allen, Adolph Miller Oakland, US 52 878
Flanigan, Michael Allen Dutch Flat, US 5 335
Pavloff, Cristopher M San Francisco, US 3 296
Scheible, Kathleen San Francisco, US 4 346
Yoshidome, Goichi Emeryville, US 31 530

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