Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same

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United States of America Patent

APP PUB NO 20070106416A1
SERIAL NO

11606484

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A method and system for adaptively controlling a laser-based material processing process are provided. The system includes sensing equipment to measure a process variable or condition of at least one of a laser-based material processing system and a workpiece processed by the material processing system and to provide a corresponding measurement signal. The control system also includes a signal processor for processing the measurement signal to obtain a processed signal which initiates, at least semi-automatically, an action associated with at least one of the material processing system and the workpiece. A method and system for at least semi-automatically qualifying a laser-based material processing system which delivers laser energy to locations on or adjacent a plurality of microstructures formed on a workpiece to at least partially process the microstructures are also provided.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC14523 SW MILLIKAN WAY BEAVERTON OR 97005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Griffiths, Joseph J Winthrop, MA 15 388
Pelsue, Kurt Wayland, MA 15 354

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