Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
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United States of America Patent
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Issued Date -
May 31, 2007
app pub date -
Nov 15, 2006
filing date -
Nov 15, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An interferometric method including: generating a variable frequency source beam; from the source beam, generating a collimated beam propagating at an angle .OMEGA. relative to an optical axis; introducing the collimated beam into an interferometer that includes a reference object and a measurement object, wherein at least a portion of the collimated beam interacts with the reference object to generate a reference beam, at least a portion of the collimated beam interacts with the measurement object to generate a return measurement beam, and the reference beam and the return measurement beam are combined to generate a combined beam; causing the angle .OMEGA. to have a first value and at a later time a second value that is different from the first value; and causing the variable frequency F to have a first value that corresponds to the first value of the angle .OMEGA. and at the later time to have a second value that corresponds to the first value of the angle .OMEGA..
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