Device with beam structure, and semiconductor device
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United States of America Patent
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Feb 3, 2009
Grant Date -
Jun 21, 2007
app pub date -
May 23, 2006
filing date -
Dec 20, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A device with a beam structure includes a substrate, an anchor and a cavity which are provided on and over the substrate, respectively, and a beam structure which is provided on the anchor and over the cavity, extends in a first direction and includes a plurality of convex portions and a plurality of concave portions, each of the convex portions having such a stress gradient as to provide a convex warp, and each of the concave portions having such a stress gradient as to provide a concave warp. The convex portions and the concave portions are alternately repeatedly arranged.
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