Flow-fill spacer structures for flat panel display device
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United States of America Patent
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May 25, 2010
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N/A
app pub date -
Aug 21, 2006
filing date -
May 17, 2000
priority date (Note) -
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Abstract
A preferred embodiment of the invention is directed to support structures such as spacers used to provide a uniform distance between two layers of a device. In accordance with a preferred embodiment, the spacers may be formed utilizing flow-fill deposition of a wet film in the form of a precursor such as silicon dioxide. Formation of spacers in this manner provides a homogenous amorphous support structure that may be used to provide necessary spacing between layers of a device such as a flat panel display.
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