Changeable Slit to Control Uniformity of Illumination
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United States of America Patent
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N/A
Issued Date -
Jun 21, 2007
app pub date -
Sep 15, 2006
filing date -
Dec 19, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Methods and apparatus for controlling illumination uniformity by altering the size of a slit are disclosed. According to one aspect of the present invention, an apparatus includes a light source, an exposure surface, and an illumination unit. The light source generates a beam that is projected onto the exposure surface. The illumination arrangement includes a first support surface and a first removable plate that is configured to be coupled to the first support surface. A first edge of the first removable plate and a second edge cooperate to at least partially define a slit through which the beam is projected.
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