Crystalline composition, device, and associated method
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United States of America Patent
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Oct 18, 2011
Grant Date -
Jun 21, 2007
app pub date -
Dec 20, 2005
filing date -
Dec 20, 2005
priority date (Note) -
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Abstract
A composition including a polycrystalline metal nitride having a number of grains is provided. These grains have a columnar structure with one or more properties such as, an average grain size, a tilt angle, an impurity content, a porosity, a density, and an atomic fraction of the metal in the metal nitride.
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