Importance

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Abstract

It is an object of the present invention to generate stable plasma and carry out continuous discharge while at the same time preventing the adherence of dust to a mouth side electrode by arranging the mouth side electrode outside the container to face a container side electrode. The apparatus for manufacturing a DLC film coated plastic container according to the present invention includes a container side electrode which forms one portion of a pressure-reducing chamber which houses a plastic container, and a mouth electrode arranged above the opening of said plastic container, wherein said container side electrode and said mouth side electrode are made to face each other via an insulating body which forms a portion of said pressure-reducing chamber, source gas supply means which supply a source gas that is converted to plasma for coating the inner wall surface of said plastic container with a DLC film includes a source gas inlet pipe formed from an insulating material provided in said pressure-reducing chamber to introduce said source gas supplied to said pressure-reducing chamber to the inside of said plastic container, exhaust means which exhaust gas inside said pressure-reducing chamber from above the opening of said plastic container are provided, and high frequency supply means which supply a high frequency is connected to said container side electrode.

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First Claim