Lithographic apparatus and device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 2, 2010
Issued Date -
N/A
app pub date -
Mar 20, 2007
filing date -
Nov 7, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An array of individually controllable elements includes elements, each formed of a stack of layers of dielectric material. At least one layer is an electro-optical material. The at least one layer's refractive index for radiation that is plane polarized in a given direction can be changed by application of a voltage in order to change the reflection/transmission characteristic of the boundary between this layer and the adjacent layer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully