Thin-film capacitor and method of manufacturing the same
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United States of America Patent
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-
Aug 17, 2010
Grant Date -
Aug 2, 2007
app pub date -
Jan 29, 2007
filing date -
Jan 30, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A thin-film capacitor element having two conductive films and a dielectric film sandwiched therebetween is provided above a substrate. An inorganic protective film covering the thin-film capacitor element and having a second opening exposing at least a part of the conductive films is provided. An organic protective film covering the thin-film capacitor element from above the inorganic protective film and having a first opening therein, which is larger than the second opening and exposes the second opening, is provided. Besides, a bump connected with the conductive films via the first opening and the second opening is provided.
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