Substrate holding unit, exposure apparatus having same, exposure method, method for producing device, and liquid repellant plate
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United States of America Patent
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Apr 22, 2014
Issued Date -
N/A
app pub date -
Jun 8, 2005
filing date -
Jun 9, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate holder includes a base; a first holding portion which is formed on the base and which attracts and holds a substrate; and a second holding portion which is formed on the base and which attracts and holds a plate member in the vicinity of the substrate attracted and held by the first holding portion. In an exposure apparatus including such a substrate holder, the plate can be exchanged easily, thereby making the maintenance of the apparatus easy. Consequently, such an exposure apparatus is suitable for immersion exposure.
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