Electromagnetically shielded induction heating apparatus
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United States of America Patent
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N/A
Issued Date -
Aug 9, 2007
app pub date -
Jan 8, 2007
filing date -
Jan 9, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An induction heating apparatus comprises a substantially gas-tight enclosure through which a workpiece passes. An induction means surrounds the exterior of the enclosure and an ac current flow though the induction means establishes a magnetic field that couples with the workpiece to inductively heat the workpiece. The gas-tight enclosure may comprise a non-electrically conductive material to permit passage of the magnetic field for coupling with the workpiece and an electromagnetic shield material for restricting the regions of the magnetic field. In alternate examples an electromagnetic shunt located around the induction means is used in place of, or in combination with, the electromagnetic shield material to restrict the magnetic field in a direction towards the workpiece. In other examples of the invention one or more flexible elements may be used with the non-electrically conductive material, for example, to compensate for thermal expansion of one or more process chambers adjacent to the gas-tight enclosure.
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Cited Art Landscape
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