MANUFACTURING METHOD OF ELECTRODE FOR ATMOSPHERIC PRESSURE PLASMA, ELECTRODE STRUCTURE, AND ATMOSPHERIC PRESSURE PLASMA APPARATUS USING THE SAME
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United States of America Patent
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Issued Date -
Aug 9, 2007
app pub date -
Aug 22, 2006
filing date -
Aug 22, 2005
priority date (Note) -
Abandoned
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Abstract
Disclosed are a method of manufacturing an electrode for generating plasma, which is capable of improving durability of the electrode and reducing production costs of the electrode, an electrode structure, and an atmospheric pressure plasma apparatus using the same. The plasma electrode structure comprises a pair of electrodes isolated from each other, a plasma generating space formed between the pair of electrodes, and an oxide coating layer formed uniformly on at least one of surfaces of the pair of electrodes.
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