Positioning member and stand for supporting holder

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20070189881A1
SERIAL NO

11351541

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A positioning member for placing a substrate transporting holder on a supporting stand, which member is provided on the side of the supporting stand and is removably insertable into a slotted guide recess formed on a bottom surface of the substrate transporting holder. The positioning member has a stainless steel body composed of a cylindrical shaft and a pointed guide formed on top of the shaft; and a film formed by the co-deposition of polyfluoroethylene and nickel on a surface of the body.

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Patent Owner(s)

Patent OwnerAddress
DAIFUKU CO LTDOSAKA CITY OSAKA OF JAPAN
SUMCO CORPORATION1-2-1 SHIBAURA MINATO-KU TOKYO 105-8634

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Toshihiko Tokyo, JP 60 914
Imao, Shunichi Tokyo, JP 7 20
Inui, Yoshitaka Minato-ku, JP 23 214
Kosugi, Akihiko Tokyo, JP 12 13

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