Positioning member and stand for supporting holder
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United States of America Patent
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-
N/A
Issued Date -
Aug 16, 2007
app pub date -
Feb 10, 2006
filing date -
Feb 10, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A positioning member for placing a substrate transporting holder on a supporting stand, which member is provided on the side of the supporting stand and is removably insertable into a slotted guide recess formed on a bottom surface of the substrate transporting holder. The positioning member has a stainless steel body composed of a cylindrical shaft and a pointed guide formed on top of the shaft; and a film formed by the co-deposition of polyfluoroethylene and nickel on a surface of the body.
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