METHODS AND APPARATUS FOR PREVENTING DEPOSITION OF REACTION PRODUCTS IN PROCESS ABATEMENT REACTORS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20070190469A1
SERIAL NO

11555087

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

In certain embodiments, methods, systems, and apparatus are provided for use in removing pollutants from a gas stream. The invention includes a thermal reaction unit formed from a plurality of stacked porous ceramic rings. The porous rings include perforations adapted to allow fluid to be flowed into the thermal reaction unit. By flowing fluid through the porous rings, deposition of waste effluent and/or by-products on the interior of the thermal reaction unit is prevented. Numerous other aspects are provided.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Daniel O Pleasanton, CA 65 1111
Crawford, Shaun W San Ramon, CA 20 494
Raoux, Sebastien Santa Clara, CA 33 2069
Vermeulen, Robert M Pleasant Hill, CA 6 267

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation