Gas Bearing Substrate-Loading Mechanism Process
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United States of America Patent
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Issued Date -
Sep 20, 2007
app pub date -
Jul 7, 2005
filing date -
Jul 9, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A levitation apparatus for use under vacuum or near vacuum conditions comprises a levitation plate (3) with a plurality of injection points (1) and adjacent suction points (2) for gas, creating an air bearing (4) and thereby supporting a thin plate-like substrate (5). Further embodiments comprise a transport mechanism for supported substrates and/or a tilting mechanism to incline the levitation plate.
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