Ellipsometry Device Provided With A Resonance Platform
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United States of America Patent
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Issued Date -
Sep 20, 2007
app pub date -
Jul 18, 2005
filing date -
Jul 21, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a useful improvement of an ellipsometer-type device. For this purpose, an existing ellipsometer is supplemented by a so-called resonance platform on which surface modes are excitable. Contrary to state of the art of known surface plasmons, the inventive modes are laterally localized. In addition, the resonance platform is not necessarily embodied in the form of a metal sheet. The inventive device also can be embodied in the form of an image-forming device. The inventive method consists in placing measurable samples on the platform surface and, afterwards, are exposed to light, thereby being excited in modes. The resonance position of modes is determined by the absorption behavior of a measurable substance.
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