Semiconductor Polishing Composition
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United States of America Patent
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Issued Date -
Sep 27, 2007
app pub date -
Mar 28, 2005
filing date -
Mar 29, 2004
priority date (Note) -
Abandoned
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Abstract
A semiconductor polishing composition is provided that can, in at least one embodiment, efficiently polish a semiconductor device with high accuracy while preventing fumed silica from being agglomerated and without causing a polishing flaw in the semiconductor device. Fumed silica, of which a bulk density of powder before dispersed is 50 g/L or more and less than 100 g/L, is used as abrasive grains. This makes it possible to enhance a dispersion state of the fumed silica, and to realize reduction in transportation cost.
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