Tuning fork vibration device and method for manufacturing the same
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United States of America Patent
Stats
-
Feb 21, 2012
Grant Date -
Oct 4, 2007
app pub date -
Mar 28, 2007
filing date -
Mar 29, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A tuning fork vibration device includes: a SOI substrate having a substrate, an oxide layer formed above the substrate and a semiconductor layer formed above the oxide layer; a tuning fork type vibration section that is formed by processing the semiconductor layer and the oxide layer and composed of the semiconductor layer; and a driving section for generating flexural vibration of the vibration section, wherein the vibration section includes a support section and two beam sections formed in a cantilever shape with the support section as a base of the beam sections, and the driving section includes a pair of drivers formed on each of the two beam sections, each of the drivers including a first electrode layer, a piezoelectric layer formed above the first electrode layer and a second electrode layer formed above the piezoelectric layer.
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