Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
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United States of America Patent
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Oct 1, 2013
Grant Date -
Oct 25, 2007
app pub date -
Mar 15, 2006
filing date -
Apr 1, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
Apparatuses, and related methods, for processing a workpiece that include a particular barrier structure that can overlie and cover a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular movable member that can be positioned over and moved relative to a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular ceiling structure that can overlie a processing chamber. Nozzle devices, and related methods, that include a particular annular body. Nozzle devices, and related methods, that include a particular first, second, and third nozzle structure.
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