Method for detecting a particle in a nanoimprint lithography system

United States of America Patent

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Dec 21, 2010
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Oct 25, 2007
app pub date
Apr 19, 2007
filing date
Apr 21, 2006

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Abstract

A method for detecting a particle between a nanoimprint mold assembly and a substrate in a nanoimprint lithography system.

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MOLECULAR IMPRINTS, INC.

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B29C:SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTAN....

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Inventor Name	Address	# of filed Patents	Total Citations
Schumaker, Philip D	Austin, US	34	576

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Method for detecting a particle in a nanoimprint lithography system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11737301

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PATENT NO	7854867
APP PUB NO	20070246850A1
SERIAL NO	11737301
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 21, 2010	US,7854867,B2 US7854867B2	GRANTED PATENT AS SECOND PUBLICATION
October 25, 2007	US,20070246850,A1 US20070246850A1	FIRST PUBLISHED PATENT APPLICATION

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11737301

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