Illumination system

United States of America Patent

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app pub date
Nov 30, 2006
filing date
Dec 2, 2005

priority date (Note)
Abandoned

status (Latency Note)

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Abstract

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A system and method are used to substantially homogenize and remove at least some coherence from a beam of radiation.

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Patent Owner(s)

Patent Owner	Address
ASML NETHERLANDS B V	P O BOX 324 VELDHOVEN 5500 AH
ASML HOLDING N V	HOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

International Classification(s)

G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Coston, Scott D	New Milford, CT	9	37
Joobeur, Adel	Milford, CT	16	127
Klinkhamer, Jacob Fredrik Friso	Delft, NL	13	43
Ryzhikov, Lev	Norwalk, CT	41	715
Shmarev, Yevgeniy Konstantinovich	Lagrangeville, NY	26	171
Vink, Henri Johannes Petrus	Den Haag, NL	13	79
Visser, Huibert	Zevenhuizen, NL	31	615

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Illumination system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11606386

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11606386

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Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

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Maintenance Fees

Full Text

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