Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
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United States of America Patent
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Dec 30, 2008
Grant Date -
Nov 15, 2007
app pub date -
Jul 13, 2007
filing date -
Aug 3, 2004
priority date (Note) -
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Abstract
The apparatus for manufacturing a silicon single crystal includes: a crucible for storing molten silicon; a pulling-up device for pulling up a silicon single crystal from the molten silicon in the crucible to grow; a detecting device for detecting a position of the crucible in a vertical direction; and a control device for controlling a pulling rate for the silicon single crystal by the pulling-up device, based on the detected position of the crucible.
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