Reactor design to reduce particle deposition during process abatement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7985379
APP PUB NO 20070274876A1
SERIAL NO

11838435

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, Ho-Man Rodney San Jose, US 8 167
Clark, Daniel O Pleasanton, US 65 1117
Crawford, Shaun W San Ramon, US 20 498
Jung, Jay J Sunnyvale, US 17 252
Todd, Leonard B Napa, US 2 91
Vermeulen, Robbert Pleasant Hill, US 12 465

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