Method for defect detection using computer aided design data

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United States of America Patent

PATENT NO 7801353
APP PUB NO 20070280527A1
SERIAL NO

11669809

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Abstract

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Images of areas of a wafer are generated and registered with respect to computer aided design (CAD) data to provide a registered images. Defects in the wafer are then detected by comparing the registered images to one another and defect location information is generated in CAD coordinates.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD7670109 REHOVOT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Almogy, Gilad Kiriat Ono, IL 206 4009
Buller, Benyamin Cupertino, US 255 7797

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