Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects
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United States of America Patent
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Issued Date -
Dec 6, 2007
app pub date -
Jun 5, 2006
filing date -
Jun 5, 2006
priority date (Note) -
Abandoned
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Abstract
Embodiments of the invention include a roll-to-roll atomic layer deposition (ALD) device. The device includes mechanisms to enable relative movement between a substrate to be deposited upon and various chambers containing ALD precursor gases.
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