Showerhead for a Gas Supply Apparatus
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United States of America Patent
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N/A
Issued Date -
Jan 3, 2008
app pub date -
Jun 29, 2006
filing date -
Jun 29, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A showerhead for a gas supply apparatus. This showerhead includes a body having a distribution plate on one side and at least one gas chamber contained within the body. A plurality of holes extend normally from an outer surface of the distribution plate to the chamber. Furthermore, at least a portion of at least one hole is frustoconical or frustopyramidal in shape along the normal axis with the base of the frustoconical or frustopyramidal hole positioned adjacent the outer surface of the distribution plate.
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