Hidden micromirror support structure
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United States of America Patent
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May 5, 2009
Grant Date -
Jan 3, 2008
app pub date -
Jun 29, 2006
filing date -
Jun 29, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.
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