METHOD AND APPARATUS FOR TRANSPORTING, QUEUING, AND LOADING OF LARGE AREA SUBSTRATES IN MULTI-TOOL PROCESSING OPERATIONS
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jan 3, 2008
app pub date -
Jun 21, 2007
filing date -
Jun 22, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate support and transport system for substrates to be processed is provided. The substrate support system includes a conveying mechanism for supporting the substrate in a vertical orientation. The conveying mechanism includes a moveable base supporting a bottom edge of the substrate and a non-contact support arm providing support to a side of the substrate. The substrate support system includes a housing disposed over the moveable base and substantially enclosing the substrate and the non-contact support arm. An air supply providing an air supply directed from a top edge of the substrate toward the base is included in the substrate support and transport system. A method of transporting a substrate is also provided.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully