Liquid aersol particle removal method

United States of America Patent

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Issued Date
Jan 10, 2008
app pub date
Jul 6, 2007
filing date
Jul 7, 2006

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Abandoned

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Abstract

Particles are removed from a surface of a substrate by a method comprising causing liquid aerosol droplets comprising water and a tensioactive compound to contact the surface with sufficient force to remove particles from the surface.

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Patent Owner(s)

Patent Owner	Address
FSI INTERNATIONAL INC	3455 LYMAN BOULEVARD CHASKA MN 55318

International Classification(s)

B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Butterbaugh, Jeffery W	Eden Prairie, MN	31	753
Gast, Tracy A	Waconia, MN	16	165

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Liquid aersol particle removal method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11825508

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SERIAL NO	11825508
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11825508

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