BRIDGE LOADPORT AND METHOD
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United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Jul 9, 2007
filing date -
Jul 10, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A bridge loadport is described comprising a tool interface, an advance plate assembly, a port plate, and a port door. The tool interface extends vertically and is configured to substantially cover one end of a process tool. The advance plate assembly is supported on the front side of the tool interface and is configured to support a front-opening unified pod (pod). The port plate extends vertically, covering an upper portion of the tool interface. An aperture having a size and shape that substantially matches a size and shape of a door of a pod is formed in the port plate. The port door has a port door actuator and a port door face attached to the port door actuator. In one embodiment, the port door face is movable with respect to the port door actuator along a ling perpendicular to the aperture.
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