Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids

United States of America Patent

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Mar 5, 2013
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Jan 10, 2008
app pub date
Jun 20, 2007
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Jul 7, 2006

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Abstract

The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.

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Patent Owner	Address
TEL FSI INC	3455 LYMAN BOULEVARD CHASKA MN 55318

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B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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Inventor Name	Address	# of filed Patents	Total Citations
Collins, Jimmy D	Allen, US	16	234
DeKraker, David	Burnsville, US	13	139
Gast, Tracy A	Waconia, US	16	165
Rose, Alan D	Wylie, US	19	939

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Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11820709

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PATENT NO	8387635
APP PUB NO	20080008834A1
SERIAL NO	11820709
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 05, 2013	US,8387635,B2 US8387635B2	GRANTED PATENT AS SECOND PUBLICATION
January 10, 2008	US,20080008834,A1 US20080008834A1	FIRST PUBLISHED PATENT APPLICATION

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11820709

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