CONDITIONING DISK HAVING UNIFORM STRUCTURES
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United States of America Patent
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N/A
Issued Date -
Jan 17, 2008
app pub date -
Jul 10, 2007
filing date -
Jul 11, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method and apparatus for conditioning a conductive polishing material is described. In one embodiment, the pad dresser comprises a backing plate adapted to coupled to a conditioning head assembly, the backing plate comprising a rigid disk having a first side and an opposing second side, the second side having a perpendicular orientation to a centerline of the backing plate, and an annular member having a base portion adhered to the second side of the backing plate, wherein the annular member defines a conditioning surface opposite the second side that is radially sloped relative to a plane of the second side.
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