Calibrating Device On A Silicon Substrate
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United States of America Patent
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Issued Date -
Jan 24, 2008
app pub date -
Jun 23, 2005
filing date -
Jun 24, 2004
priority date (Note) -
Abandoned
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Abstract
The invention relates to a calibration device on a silicon substrate SU formed in addition to a reference level Nc by at least two distinct levels Ng, ND. These levels present distinct doping concentrations. The invention also provides a method of making the calibration device, the method including a definition step for defining at least two sections Sg, Sd distinct from a reference section Sc on a silicon substrate SU. This definition step consists in doping the sections different from the reference section at different concentrations.
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