Glan-Thompson Type Broadband Polarizer Device for Use in the Deep Ultraviolet Spectral Range and Method of Its Manufacture

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United States of America Patent

APP PUB NO 20080018991A1
SERIAL NO

10591651

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Abstract

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A broadband polarizer device of a Glan-Thompson type is described, as well as a method of manufacturing such device. Such parameters as a material of the polarizer prisms, the prisms' configuration and a glue material, are selected so as to ensure total internal reflection for the broadband input light, including DUV spectral range (from about 190 nm). The glue material is selected so as to be characterized by a dispersion profile matching that of the polarizer prisms' material for extraordinary and ordinary rays in the broadband spectral range. Different methods of manufacturing such broadband polarizer are described is disclosed.

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Patent Owner(s)

Patent OwnerAddress
NOVA MEASURING INSTRUMENTS LTDP O BOX 266 WEIZMANN SCIENCE PARK REHOVOT 7610201

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Finaroy, Moshe Rehovot, IL 1 1
Gov, Shahar Rehovot, IL 11 43
Winik, Michael Mazkeret Batya, IL 6 31

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